| 000 | 00409nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 160910s9999 xx 000 0 und d | ||
| 040 | _cSGVU Library | ||
| 041 | _cEnglish. | ||
| 100 | _aLewis. | ||
| 245 |
_aHazard assessment & control tech. In semiconductor manufacturing. _cBy J.H. Lewis. |
||
| 260 | _bLewis Pub., Michigan. | ||
| 520 | _aEngineering | ||
| 650 | _aElectrical Engineering | ||
| 942 | _cBOOKS | ||
| 999 |
_c1831 _d1831 |
||