| 000 | 00378nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 160910s9999 xx 000 0 und d | ||
| 040 | _cSGVU Library | ||
| 041 | _cEnglish | ||
| 100 | _aGeng, H. | ||
| 245 |
_aHand Book of Semiconductor Manufacturing _cBy H. Geng |
||
| 260 | _bTata McGraw Hill | ||
| 520 | _aEngineering | ||
| 650 | _aElectrical Engineering | ||
| 942 | _cBOOKS | ||
| 999 |
_c11842 _d11842 |
||