| 000 | 00385nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 160910s9999 xx 000 0 und d | ||
| 040 | _cSGVU Library | ||
| 041 | _cEnglish | ||
| 100 | _aCampbell, S.A. | ||
| 245 |
_aThe Science & Engineering of Microelectronic Fabrication _cBy S.A. Campbell |
||
| 260 | _bOxford | ||
| 520 | _aEngineering | ||
| 650 | _aElectronics | ||
| 942 | _cBOOKS | ||
| 999 |
_c10127 _d10127 |
||