000 00385nam a2200145Ia 4500
008 160910s9999 xx 000 0 und d
040 _cSGVU Library
041 _cEnglish
100 _aCampbell, S.A.
245 _aThe Science & Engineering of Microelectronic Fabrication
_cBy S.A. Campbell
260 _bOxford
520 _aEngineering
650 _aElectronics
942 _cBOOKS
999 _c10127
_d10127