Hsu, T.R. <br/><br/>
MEMS & micro systems design & manufacture. 
By  T.R. Hsu 
 -  Tata McGraw Hill 
<br/><br/> Engineering 
<br/><br/><label>ISBN: </label>0072393912 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics